发明名称 |
Exposure apparatus that compensates for spherical aberration of an image forming device |
摘要 |
An exposure apparatus wherein an image forming system forms an image of a pattern upon a photosensitive layer, and a detecting system detects a spherical aberration of the image forming system. The detected spherical aberration of the image forming system is adjusted or controlled in a suitable way, whereby correct pattern transfer operation is assured.
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申请公布号 |
US5789734(A) |
申请公布日期 |
1998.08.04 |
申请号 |
US19940242442 |
申请日期 |
1994.05.13 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
TORIGOE, MAKOTO;SUZUKI, AKIYOSHI |
分类号 |
G02B13/00;G03F7/20;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G01N21/86 |
主分类号 |
G02B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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