发明名称 |
Low cost, high average power, high brightness solid state laser |
摘要 |
A high average power, high brightness solid state laser system. We first produce a seed laser beam with a short pulse duration. A laser amplifier amplifies the seed beam to produce an amplified pulse laser beam which is tightly focused to produce pulses with brightness levels in excess of 1011 Watts/cm2. Preferred embodiments produce an amplified pulse laser beam having an average power in the range of 1 kW, an average pulse frequency of 12,000 pulses per second with pulses having brightness levels in excess of 1014 Watts/cm2 at a 20 mu m diameter spot which may be steered rapidly to simulate a larger spot size. Alternately, a kHz system with several (for example, seven) beams (from amplifiers arranged in parallel) can each be focused to 20 mu m and clustered to create effective spot sizes of 100 to 200 mu m. These beams are useful in producing X-ray sources for lithography.
|
申请公布号 |
US5790574(A) |
申请公布日期 |
1998.08.04 |
申请号 |
US19970845185 |
申请日期 |
1997.04.21 |
申请人 |
IMAR TECHNOLOGY COMPANY |
发明人 |
RIEGER, HARRY;SHIELDS, HENRY;FOSTER, RICHARD M. |
分类号 |
G03F7/20;H01S3/0941;H01S3/098;H01S3/102;H01S3/11;H01S3/23;(IPC1-7):H01S3/10 |
主分类号 |
G03F7/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|