发明名称 CONVEYER AND CONVEYING METHOD
摘要 PROBLEM TO BE SOLVED: To simplify a constitution and measure a position of the plate while avoiding contact with a plate as much as possible. SOLUTION: Only two reference pins 4a, 4b (support part 8) are brought into contact with a peripheral edge of a plate 2, in this way, contact with the plate 2 can be avoided as far as possible. On the other hand, when receiving fore of at least one pin 4b can be detected by pressure sensor 7, a position of the center of gravity of the plate 2 can be obtained, in this way, a position of the plate 2 can be measured.
申请公布号 JPH10203648(A) 申请公布日期 1998.08.04
申请号 JP19970017747 申请日期 1997.01.17
申请人 NIKON CORP 发明人 KATSUME TOSHIHIRO;HARA NORIHIKO
分类号 B65G47/88;H01L21/027;H01L21/677;H01L21/68;(IPC1-7):B65G47/88 主分类号 B65G47/88
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