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发明名称
DIAMONDLIKE CARBON THIN FILM DEPOSITING DEVICE
摘要
申请公布号
JPH10204641(A)
申请公布日期
1998.08.04
申请号
JP19970008683
申请日期
1997.01.21
申请人
NICHIMEN DENSHI KOKEN KK
发明人
SAKAMOTO YUICHI
分类号
C30B30/02;C23C16/26;C23C16/27;(IPC1-7):C23C16/26
主分类号
C30B30/02
代理机构
代理人
主权项
地址
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