| 摘要 |
PROBLEM TO BE SOLVED: To provide a method to easily make the polishing end point detactable while polishing, which becomes difficult by causing a top ring to make a reciprocating motion. SOLUTION: With regard to a polishing method of polishing a polishing object to a flat and glassy surface by pressing a top ring 13 holding the polishing object against a polishing cloth 11 stuck to a rotating turntable 12 surface and causing the top ring 13 to make a reciprocating motion on the turntable 12, a polishing end point is detected by continuously gauging and moving averaging the torque acting on the turntable 12 and detecting the torque variation produced when polishing of the polishing object reaches a dissimilar material. |
