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发明名称
DRY-ETCHING METHOD
摘要
申请公布号
JPH10199869(A)
申请公布日期
1998.07.31
申请号
JP19970013402
申请日期
1997.01.08
申请人
TOKYO ELECTRON LTD
发明人
KOSHIISHI AKIRA;HONDA RYUJI
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/768;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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