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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10199881(A)
申请公布日期
1998.07.31
申请号
JP19970003541
申请日期
1997.01.13
申请人
NEC CORP
发明人
MIKAGI IKU
分类号
H01L21/28;H01L21/3115;H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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