| 摘要 |
PROBLEM TO BE SOLVED: To specify the extent of a gas leak in real time by providing a duct pressure detecting means, a flow sensor, and a flow rate measuring means and finding the correlation between the flow rate and differential pressure of a gas flowing between pressure sensors when no gas leak occurs and the correlation between flow rate information and differential pressure information. SOLUTION: In an airtightness inspection process, the collection of either flow rate information 16a or differential pressure informationΔP1,...,ΔPn is urged and, at the same time, leakage tests are conducted on a duct 32 by using the collected information. In a correlation defining process, the correlation between the flow rate and differential pressure of a gas flowing through a prescribed section when no gas leak occurs and the correlation between the information 16a and information,ΔP1,...,ΔPn are found. In a duct pressure detecting process, pressure signals P1,..., Pn are generated by detecting the pressure of the gas in a plurality of sections in the duct 32. Namely, the occurrence of a gas leak is discriminated by comparing the correlation between the flow rate and differential pressure of the gas flowing between a built-in pressure sensor 13 and a first pressure sensor 121 when no gas leak occurs and the correlation between the information 16a and information,ΔP1.
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