DEVICE HAVING HEAT SOURCE,申请号JP19970013337-传众专利搜索

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发明名称	DEVICE HAVING HEAT SOURCE
摘要
申请公布号	JPH10199781(A)	申请公布日期	1998.07.31
申请号	JP19970013337	申请日期	1997.01.08
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	HAYASHI TOYOHIDE;OTANI MASAMI
分类号	H01L21/027;G03F7/20;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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