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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH10199886(A)
申请公布日期
1998.07.31
申请号
JP19970000339
申请日期
1997.01.06
申请人
发明人
分类号
H01L21/60;H01L21/321;(IPC1-7):H01L21/321
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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