HEAT EXHAUST STRUCTURE OF SEMICONDUCTOR MANUFACTURE DEVICE,申请号JP19970014695-传众专利搜索

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发明名称	HEAT EXHAUST STRUCTURE OF SEMICONDUCTOR MANUFACTURE DEVICE
摘要
申请公布号	JPH10199821(A)	申请公布日期	1998.07.31
申请号	JP19970014695	申请日期	1997.01.10
申请人	KOKUSAI ELECTRIC CO LTD	发明人	IZUMI MANABU
分类号	H01L21/22;H01L21/205;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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