| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a carrying tool which can reduce the taking-out of treatment liquid. SOLUTION: A carrying tool is constituted of a pair of clamping members 10. Apertures 11 are formed in the central parts of the respective clamping members 10, and peripheral parts of semiconductor substrates M are inserted so as to be clamped from both sides. Two slopes 13, 14 whose slanting directions are different with each other are formed on bottoms of the respective clamping members 10. Each of the two slopes 13, 14 is protruded downward toward the central part, and one top part 15 is formed. When the carrying tool is immersed in a treatment liquid, the treatment liquid stuck on the carrying tool gathers at the top part 15, forms large droplets and drops downward. Thereby the taking-out of the treatment liquid with the carrying tool can be prevented.</p> |
