| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer-testing apparatus, capable of aligning a wafer if a probe needle deviates from a reference position. SOLUTION: During moving of a movable table a probe needle, reference position is photographed by a CCD camera 28. Travel amount data A' of the table to this reference position is compared with trav amount data A to be a reference stored in a third memory of an alignment adjuster. When the data A' and A are equal, the movable table 20 is moved by a travel distance L stored in a second memory, i.e., the distance for aligning electrode pads, using the probe needle. When the data are not equal, the data L in the second memory is corrected by a deviated amount to move the table.</p> |
