| 摘要 |
PROBLEM TO BE SOLVED: To realize a long service life and reduce the change in distribution of beam intensity of laser light when controlling the laser output by preventing the deterioration of the main discharging electrode and the laser gas due to residual potential of a primary capacitor. SOLUTION: This laser device is provided with an output measuring device 18 which measures an output of laser light 16 (laser output P) outputted from a laser body 2 and a preionization controller 48 which compares the laser output P measured thereby with a set value S to the laser output P and reduces a pulse electric power to be supplied from a preionization power supply 42 to a preionization device 10 when the P is larger than the S or increases the pulse electric power when the P is smaller than the S. |
