MANUFACTURE OF MULTI-LAYERED WIRING,申请号JP19970002538-传众专利搜索

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发明名称	MANUFACTURE OF MULTI-LAYERED WIRING
摘要
申请公布号	JPH10199976(A)	申请公布日期	1998.07.31
申请号	JP19970002538	申请日期	1997.01.10
申请人	SONY CORP	发明人	HASEGAWA TOSHIAKI
分类号	H01L21/28;H01L21/768;(IPC1-7):H01L21/768	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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