| 摘要 |
PROBLEM TO BE SOLVED: To provide a limiting current-type oxygen sensor which can be mass- produced through a simple manufacturing process and can be easily compounded with a peripheral circuit, etc. SOLUTION: A limiting-current type oxygen sensor is composed of a cathode 31 formed on a substrate 10, a solid-state electrolyte layer 20 having a columnar crystal structure, and an anode 32 formed on the layer 20. Since columnar crystals are formed in the columnar crystal structure of the electrolyte layer 20, gaps elongated in the thickness direction of the layer 20 are formed between the crystal grains and oxygen on the surface side is introduced to the cathode 31 through the gaps. Therefore, the electrolyte layer 20 functions as an ionic conductor and a diffusion controlled layer. |
