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发明名称
MANUFACTURE OF SOI SUBSTRATE
摘要
申请公布号
JPH10199840(A)
申请公布日期
1998.07.31
申请号
JP19970000308
申请日期
1997.01.06
申请人
SONY CORP
发明人
IKEDA TADASHI
分类号
H01L21/762;H01L21/02;H01L21/265;H01L21/304;H01L21/76;H01L27/12;(IPC1-7):H01L21/304
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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