发明名称 WIRE-BONDING METHOD
摘要 PROBLEM TO BE SOLVED: To always make const. the shape and size of a ball formed at the top of an Au wire by straightening this wire bent at bonding to a second bond point and keeping a const. distance between the top of the wire and spark electrode in the next step. SOLUTION: After bonding to a second bond point B2 , an Au wire 2 is fed by a fixed length from the top end of a capillary 1, such that after bonding, the capillary 1 is moved back by a specified length from the bond point B2 to a first bond point in the reverse direction (arrow 1) to that at wiring, while the moved up by specified length (arrow 2). When the capillary 1 is moved up by the specified length, the wire 2 is held by clamps 3 and pulled up to cut off the wire 2 connected to the point B2 .
申请公布号 JPH10199914(A) 申请公布日期 1998.07.31
申请号 JP19970011919 申请日期 1997.01.07
申请人 KAIJO CORP 发明人 NISHIMAKI KOUJI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址