Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions,申请号EP19920830445-传众专利搜索

发明名称	Method and apparatus for sputtering superconducting thin films of niobium on quarter-wave resonant cavities of copper for accelerating heavy ions
摘要
申请公布号	EP0527713(B1)	申请公布日期	1998.07.29
申请号	EP19920830445	申请日期	1992.08.12
申请人	ISTITUTO NAZIONALE DI FISICA NUCLEARE	发明人	PALMIERI, VINCENZO;PRECISO, RENATO;RUZINOV, VLADIMIR L.
分类号	C23C14/16;C23C14/34;C23C14/38;H01L39/24;H05H7/20;(IPC1-7):C23C14/02;H01L39/00;H01J37/34	主分类号	C23C14/16
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