Microstructure for vibratory gyroscope

摘要

A microstructure for a vibratory gyroscope has a ring portion (14) supported so as to allow substantially undamped, high-Q radial vibration. The ring portion (14) is electrically conductive and comprises a charge plate (14) for a plurality of radially disposed charge conductive sites (13) around its perimeter for sensing radial displacements thereof. The ring (14), its support (15) and charge conductive sites (13) are formed within sacrificial moulds on one surface of a conventional silicon substrate which may comprise a monolithic integrated circuit.