Pressure transducer apparatus and method for making

摘要

A fluid pressure responsive capacitive transducer (20) having a lowered manufacturing cost is shown in which a sheet (10) of cast or roll compacted tape material having a selected thickness is partitioned into a multitude of rectangular substrates portions (16) and another sheet (12) having another selected thickness is partitioned into a like number and sized diaphragm portions (18) and are processed in sheet form to apply capacitor plates and associated conductive traces as well as a sealing and spacing glass layer. At least one sheet is then separated into groups, generally comprising one, two or four portions. and pairs of groups of substrates and diaphragms are held together and heated to seal the transducers. Groups of more than one portion of the first and second sheets are then separated into individual transducers. <IMAGE>