| 摘要 |
PROBLEM TO BE SOLVED: To prevent a streak from generating in a film in the width direction in a state in which the film is applied to a substrate even when the film is kept stopped for a long time by cooling at least an area near a cover film peeling start point of a film separating member. SOLUTION: When a film 12 is thermo-compression-bonded to a substrate in a sequential fashion by a lamination roll, in the case where a waiting time is long from the film 12 is temporarily adsorbed and held by a temporary applying member to it is temporarily applied to a leading end of the substrate, an exposed photo-sensitive resin layer 12B on the film 12 is pulled by a cover film 12C and slightly sets in a floating state, and then, when the film 12 starts to move, the slightly setting photosensitive resin layer 12B is forced to be peeled from the cover film 12C at a film separating position located at a leading end of a film separating member 16. Then, the film separating member 16 is maintained at a predetermined temperature or less by causing cold water to pass through the film separating member 16 to thereby maintain the hardness of the photo-sensitive resin layer 12B at a certain level or higher. |
