发明名称 Single crystal growing apparatus
摘要 In a single crystal growing apparatus which pulls a semiconductor single crystal rod 14 from a semiconductor melt 13 contained in a quartz crucible 5 to grow the semiconductor single crystal, quartz crucible 5 is designed such that it can move up and down so as to maintain the level of semiconductor melt 13 constant and a main heater 7 which can move up and down and a subheater 10 which can move up and down are provided to heat semiconductor melt 13 so that the thermal environment of semiconductor melt 13 is maintained substantially constant.
申请公布号 US5785758(A) 申请公布日期 1998.07.28
申请号 US19960777670 申请日期 1996.12.20
申请人 YAMAGISHI, HIROTOSHI;TAKANO, KIYOTAKA;KIMURA, MASANORI 发明人 YAMAGISHI, HIROTOSHI;TAKANO, KIYOTAKA;KIMURA, MASANORI
分类号 C30B15/14;C30B29/06;H01L21/208;(IPC1-7):C30B35/00 主分类号 C30B15/14
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