发明名称 |
Liquid vaporizing apparatus |
摘要 |
A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
|
申请公布号 |
US5785902(A) |
申请公布日期 |
1998.07.28 |
申请号 |
US19970851500 |
申请日期 |
1997.05.05 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA;RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION |
发明人 |
YAMAGUCHI, TOORU;TSUTAHARA, KOUICHIROU;SUENAGA, TAKAYUKI |
分类号 |
H01L21/205;B01D1/00;B01D1/14;B01D1/26;B01D3/34;B01J7/02;C23C16/448;G06F1/26;G11C7/00;G11C11/407;G11C29/00;G11C29/06;H01L21/31;(IPC1-7):B01F3/04 |
主分类号 |
H01L21/205 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|