发明名称 Junction field-effect transistor (JFET) semiconductor integrated circuit device including JFET
摘要 A plurality of JFETs (junction field-effect transistors) can be formed on the same substrate while being electrically separated from each other, and can be also combined with a CMOS (complementary metal-oxide semiconductor). A P-type Si layer 14 is fabricated on a semiconductor substrate 11 as an island. On this island of P-type Si layer, an N+ source region 19 and N+ drain region, and a channel region having a length of "Lg" and a channel depth of "Tg" are fabricated. The shape of the gate region with the gate length of "Lg" is not a V-shaped-structure. Another P type layer 21 of the gate region is fabricated on the same plane as the source region 19 and the drain region 15.
申请公布号 US5786615(A) 申请公布日期 1998.07.28
申请号 US19960651637 申请日期 1996.05.22
申请人 SEIKO INSTRUMENTS INC. 发明人 SAITO, YUTAKA
分类号 H01L27/06;H01L21/02;H01L21/337;H01L21/8232;H01L27/095;H01L27/12;H01L29/10;H01L29/73;H01L29/808;(IPC1-7):H01L27/01 主分类号 H01L27/06
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