THIN FILM ACTUATED MIRROR ARRAY FOR USE IN AN OPTICAL PROJECTION SYSTEM

摘要

An array of M x N thin film actuated mirrors (101) comprises a switching matrix (102), an array (103) of M x N pairs of supporting members (104), and an array (105) of M x N actuating structures (106), wherein the active matrix includes a substrate (110) and a first (112), a second (113) and a third (114) conduction line patterns printed on top thereof, and each of the actuating structures (106) is provided with a pair of actuators (121) and a pair of gate actuators (122). With the presence of the gate actuators (122) in each of the actuating structures (106) in conjunction with the first (112), the second (113) and the third (114) conduction line patterns on the switching matrix (102), it is possible to eliminate the use of transistors in the array of M x N thin film actuated mirrors (101).