发明名称 |
Optical coupler sensor with movable optical waveguide |
摘要 |
The present invention relates to an optical coupler sensor employing a fixed optical waveguide and a movable optical waveguide which allows detection of every small physical quantities and their changes with a high sensitivity, and a process for preparing the same. The optical coupler sensor of the present invention comprises: a fixed optical waveguide formed on a substrate and disposed along a predetermined path. A movable optical waveguide is linked to a cantilever formed on the substrate, which is moved up and down by an external force. The moveable waveguide is disposed outside of the predetermined path.
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申请公布号 |
US5787212(A) |
申请公布日期 |
1998.07.28 |
申请号 |
US19960669789 |
申请日期 |
1996.06.28 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
HONG, SONG-CHEOL;HA, DOO-YOUNG |
分类号 |
G01D5/26;G01G3/12;G01H9/00;G01P15/093;G02B6/12;G02B6/35;G02B6/36;(IPC1-7):G02B6/00 |
主分类号 |
G01D5/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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