发明名称 |
Process and plant for the production of a gaseous mixture containing a carrier gas, an oxidizing gas and a silane |
摘要 |
The process forms a gaseous mixture of predetermined composition, containing a carrier gas, oxidant and silane. A primary gas mixture is formed from a second neutral gas and the silane. The silane content is below the spontaneous flammability limit of silane in air. A first gas stream is prepared, comprising carrier gas with controlled oxidant gas residual. The required mixture is achieved as a function of the residual oxidant content in the carrier gas stream. Also claimed are: (i) the plant for the above process; and (ii) gaseous mixtures formed by the above process. |
申请公布号 |
AU5108298(A) |
申请公布日期 |
1998.07.23 |
申请号 |
AU19980051082 |
申请日期 |
1998.01.12 |
申请人 |
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION D |
发明人 |
ALAIN VILLERMET;FRANCOIS COEURET;PANAYOTIS COCOLIOS;MICHEL INIZAN |
分类号 |
B05C11/10;B01F3/02;C01B33/02;C23C16/40;C23C16/44;C23C16/455 |
主分类号 |
B05C11/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|