发明名称 Temperature measuring device for rotating turntable
摘要 The measuring device uses at least one temperature sensor (6,7) thermally coupled to the rotating turntable, which is made of a ferro-, or paramagnetic material and/or a ferroelectric material. A measuring circuit (8) associated with the temperature sensor has a polarisation device (10) and a stationary detector (11) providing a measuring signal representing the temperature of the turntable upon passage of the sensor, using the temperature dependent magnetic or electric susceptibility of the latter.
申请公布号 DE19702140(A1) 申请公布日期 1998.07.23
申请号 DE19971002140 申请日期 1997.01.22
申请人 SIEMENS AG, 80333 MUENCHEN, DE 发明人 OBERSCHMID, REIMUND, DR., 93161 SINZING, DE;SPORRER, KONRAD, 93059 REGENSBURG, DE
分类号 G01K7/38;(IPC1-7):G01K7/01;G01K7/36;H01L21/68 主分类号 G01K7/38
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