<p>A thin-film fabrication method includes a spray step in which at least one thin-film composition material in liquid form is sprayed into a vacuum vessel via a spray nozzle provided for each thin-film composition material and deposited on a substrate, and a heat treatment step in which the material deposited on the substrate is heat treated. The substrate temperature in the spray step and/or the heat treatment step is controlled within a prescribed temperature range. <IMAGE></p>
申请公布号
EP0854024(A2)
申请公布日期
1998.07.22
申请号
EP19980300355
申请日期
1998.01.19
申请人
AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY OF MINISTRY OF INTERNATIONAL TRADE AND INDUSTRY;DAINICHISEIKA COLOR & CHEMICALS MFG. CO., LTD.;HIRAGA, TAKASHI;MORIYA, TETSUO