Coating solutions for use in forming bismuth-based ferro-electric thin films, and ferro-electric thin films, ferro-electric capacitors and ferro-electric memories formed with said coating solutions, as well as processes for production thereof

摘要

A coating solution (I) used in forming Bi-based ferroelectric thin films (II) containing Bi, metallic element A (Bi, Pb, Ba, Sr, Ca, Na, K and/or rare earth elements) and metallic B (Ti, Nb, Ta, W, Mo, Fe, Co and/or Cr), is claimed. (II) contains metal alkoxides of Bi and metallic elements A and B respectively, and an organometallic compound obtained by hydrolysing a composite metal alkoxide, formed by two or more metal alkoxides with water or optionally with a catalyst, and contains 1-1.1 times the stoichiometric amount of Bi. Also claimed are: (i) (II) formed by the application of (I) onto an electrode on a substrate followed by annealing the applied coating; (ii) a ferroelectric capacitor and memory containing (II) and (iii) a process for producing (II) by applying (I) onto an electrode formed over a substrate and annealing the applied coating (I).