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发明名称
Beam charge exchanging apparatus
摘要
申请公布号
EP0663671(B1)
申请公布日期
1998.07.22
申请号
EP19940120961
申请日期
1994.12.30
申请人
EBARA CORPORATION
发明人
SAITO, MUTSUMI;YAHIRO, TOMOYUKI;HATAKEYAMA, MASAHIRO
分类号
H05H3/02;G21K1/14;(IPC1-7):G21K1/14
主分类号
H05H3/02
代理机构
代理人
主权项
地址
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