发明名称 Fluidized bed deposition of diamond
摘要 A process for coating a substrate with diamond or diamond-like material including maintaining a substrate within a bed of particles capable of being fluidized, the particles having substantially uniform dimensions and the substrate characterized as having different dimensions than the bed particles, fluidizing the bed of particles, and depositing a coating of diamond or diamond-like material upon the substrate by chemical vapor deposition of a carbon-containing precursor gas mixture, the precursor gas mixture introduced into the fluidized bed under conditions resulting in excitation mechanisms sufficient to form the diamond coating.
申请公布号 US5783335(A) 申请公布日期 1998.07.21
申请号 US19920864725 申请日期 1992.04.07
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, OFFICE OF TECHNOLOGY TRANSFER 发明人 LAIA, JR., JOSEPH R.;CARROLL, DAVID W.;TRKULA, MITCHELL;ANDERSON, WALLACE E.;VALONE, STEVEN M.
分类号 B01J8/18;B01J8/24;B01J8/42;C23C16/27;C23C16/442;C30B25/02;(IPC1-7):B01J8/24 主分类号 B01J8/18
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