| 摘要 |
PROBLEM TO BE SOLVED: To prevent signal cross talk between a plurality of electrodes or wirings and improve S/N ratio and degree of freedom in designing a circuit by providing a plurality of electrodes or wirings in a movable part and providing an electrically insulating area between them. SOLUTION: A semiconductor micromachine 1 is provided with a substrate 12 and a movable part 13, which is formed of polycrystalline silicon film, arranged by facing the substrate 12 having a space in between and is supported by needle-shaped bodies 15 and 150. In the movable part 13, electrodes, which are composed of a driving electrode 161 and a detecting electrode 162, and a wiring 159 are provided, and an electrically insulating area 160 is provided between the electrodes. Thus, the driving electrode 161, the detecting electrode 162 and the wiring 159 are electrically independent from each other. |
