发明名称 ELECTORDE FOR FERROELECTRIC BODY AND FERROELECTRIC DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an electrode for a ferroelectric body, in which film fatigue caused by the repetitively alternate polarization of a ferroelectric body can be reduced, and residual polarization the ferroelectric body can be prevented from being reduced and to provide a non-volatile memory device which can be improved in data write characteristic and attaining lower power consumption. SOLUTION: A ferroelectric electorde (a lower electorde 8 or an upper electorde 10) which is laminated on a ferroelectric body 9 for the formation of a laminated structure has substantially the same crystal structure as the ferroelectric body 9 and is formed of an electrically conductive oxide. Specifically, the ferroelectric electrode is formed of ReO3 , which is of crystal structure where a hole is located at an A-site, and metal ion, enter in the hole of ReO3 from the ferroelectric body.
申请公布号 JPH10189887(A) 申请公布日期 1998.07.21
申请号 JP19960349666 申请日期 1996.12.27
申请人 SANYO ELECTRIC CO LTD 发明人 KANEDA KAZUHIRO
分类号 H01L21/8247;H01L21/822;H01L21/8242;H01L21/8246;H01L27/04;H01L27/10;H01L27/105;H01L27/108;H01L29/788;H01L29/792 主分类号 H01L21/8247
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