发明名称 CONVEYOR
摘要 PROBLEM TO BE SOLVED: To determine the exchanging time of a belt beforehand properly when the revolution and driving of a motor are transmitted to a screw shaft through a pulley and the belt, and an article to be conveyed is conveyed by a moving body along the screw shaft by the rotation of the screw shaft. SOLUTION: A moving body 32 is moved linearly by the revolution of a ball screw shaft 31. A timing belt 36 is stretched between a following pulley 33 for the ball screw shaft 31 and a driving pulley 35 for the shaft of a motor 34. Each signal of a first encoder 38 detecting the angular displacement of the shaft of the motor 34 and a second encoder 39 detecting the angular displacement of the ball screw shaft 31 is input to a controller 37, and a correlation value is obtained, and compared with a beforehand acquired reference value. A waning is issued properly on the basis of the difference of the comparison.
申请公布号 JPH10189686(A) 申请公布日期 1998.07.21
申请号 JP19960356120 申请日期 1996.12.25
申请人 TOKYO ELECTRON LTD 发明人 HASEGAWA IZUMI;NISHIJIMA YUICHI
分类号 B65G1/00;B65G43/08;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65G1/00
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