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发明名称
ION BEAM WORK DEVICE
摘要
申请公布号
JPH10188872(A)
申请公布日期
1998.07.21
申请号
JP19960347474
申请日期
1996.12.26
申请人
HITACHI LTD
发明人
OISHI SEITARO;ONUKI HISAO;TANAKA SHIGERU
分类号
B23K15/00;H01J27/08;H01J37/08;H01J37/248;H01L21/302;H01L21/3065;(IPC1-7):H01J37/248;H01L21/306
主分类号
B23K15/00
代理机构
代理人
主权项
地址
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