| 摘要 |
PROBLEM TO BE SOLVED: To obtain excellent overall durability, such as still life, traveling durability and weather resistant preservable property, without impairing electromagnetic conversion characteristics by providing the medium with a ferromagnetic metallic thin film which is formed on a nonmagnetic substrate, a silicon atom-contg. carbon film which is formed on the metallic thin film and is increased in silicon atom concn. in a depth direction from the extreme surface and a lubricant layer which is formed thereon. SOLUTION: The ferromagnetic metallic thin film 3 is formed by a vacuum film forming method on the nonmagnetic substrate 4. Co-Ni-O, Co-O, Co-Cr, etc., are usable as the material. The silicon atom-contg. carbon film which is increased in the silicon atom concn. in the depth direction from the extreme surface is formed by a plasma enhanced CVD method on the ferromagnetic metallic thin film 3. The fluorine-contained lubricant layer 1 is formed on the silicon atom-contg. carbon film 2. The lubricant layer 1 is formed by a wet process coating application method or org. vapor deposition method, etc. |
