SEMICONDUCTOR PROCESS SIMULATION AND STORAGE MEDIUM FROM WHICH SEMICONDUCTOR PROCESS SIMULATION PROCEDURE CAN BE READ BY COMPUTER,申请号JP19960354760-传众专利搜索

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发明名称	SEMICONDUCTOR PROCESS SIMULATION AND STORAGE MEDIUM FROM WHICH SEMICONDUCTOR PROCESS SIMULATION PROCEDURE CAN BE READ BY COMPUTER
摘要
申请公布号	JPH10189407(A)	申请公布日期	1998.07.21
申请号	JP19960354760	申请日期	1996.12.20
申请人	RICOH CO LTD	发明人	HINO TAKESHI
分类号	H01L21/22;H01L21/00;H01L21/02;H01L21/316;(IPC1-7):H01L21/02	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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