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发明名称
DEPOSITION OF METAL FILM
摘要
申请公布号
JPH10189493(A)
申请公布日期
1998.07.21
申请号
JP19970311349
申请日期
1997.10.28
申请人
NIPPON STEEL CORP
发明人
YOSHIZAWA SHUNICHI
分类号
C23C16/14;H01L21/28;H01L21/285;(IPC1-7):H01L21/285
主分类号
C23C16/14
代理机构
代理人
主权项
地址
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