| 摘要 |
PROBLEM TO BE SOLVED: To reduce ion interference and obtain high mass resolution, permeating efficiency and transmitting efficiency. SOLUTION: A plasma mass spectrometer comprises a plasma torch 1 generating an ion from a sample introduced in plasma 2, nozzle-skimmer interface 3, 5 making an ion permeate or transmitting it to a first vacuum chamber 11, ion guide means 12, diaphragm 18 dividing the first vacuum chamber from a second vacuum chamber to be drilled, and an ion mass-to-charge ratio analyzer in the second vacuum chamber. The ion guide means comprises a multi-pole rod-set 13, 14, 15, means applying AC voltage across rods, and means 22 which is a means 22 introducing inactive gas to the ion guide means to generate a partial pressure of the inactive gas in the rod-set so as to obtain at least 10-3Torr. An interference peak by Ar+ or the like in the spectrum is reduced by a constitution thus formed. |
