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发明名称
SEMICONDUCTOR PRESSURE SENSING DEVICE AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
JPH10190004(A)
申请公布日期
1998.07.21
申请号
JP19960343269
申请日期
1996.12.24
申请人
SONY CORP
发明人
MUKAI MIKIO
分类号
G01L1/14;H01L29/84;(IPC1-7):H01L29/84
主分类号
G01L1/14
代理机构
代理人
主权项
地址
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