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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10189470(A)
申请公布日期
1998.07.21
申请号
JP19960342928
申请日期
1996.12.24
申请人
SONY CORP
发明人
MIWA HIROYUKI
分类号
H01L29/73;H01L21/265;H01L21/331;H01L29/732;(IPC1-7):H01L21/265
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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