SUBSTRATE TREATMENT EQUIPMENT, SUBSTRATE CONVEYOR AND SUBSTRATE TREATMENT UNIT

摘要

PROBLEM TO BE SOLVED: To prevent the disturbance of the state of a treatment atmosphere in a substrate treatment unit by the intrusion of an air flow supplied from an upper section. SOLUTION: A flow regulating member 34 is installed to a substrate conveyor 30 mounted on a substrate conveying path 40 through fixing members 33. The upper section of the substrate supply-discharge port 16 of substrate heating units 10a or a substrate cooling unit 10b is covered with the flow regulating member 34 at the time of the delivery of a substrate and the flow regulating member 34 is inclined so that an air flow 41 is introduced to the reverse sides of the substrate heating units 10a or the substrate cooling unit 10b, and the flow regulating member 34 prevents intrusion into the inside of the air flow 41 when the substrate supply-discharge port 16 is opened.