发明名称 Positive-working radiation-sensitive mixture
摘要 A positive-working radiation-sensitive mixture essentially consists of (a1) at least one water-insoluble, organic polymeric binder which contains acid-labile groups and becomes soluble in aqueous alkaline solutions as a result of the action of acid, or (a2.1) a polymeric binder which is insoluble in water and soluble in aqueous alkaline solutions and (a2.2) a low molecular weight organic compound whose solubility and aqueous alkaline developer is increased as a result of the action of acid, and (b) at least one organic compound which produces an acid under the action of actinic radiation, and, if required, (c) one or more further organic compounds which differ from (b), at least one of the components (a1), (a2.1), (a2.2), (b) and (c) containing a bonded group of the general formula (I) -O(-)N(+)R4, or component (c) being of the formula (II) <IMAGE> (II) The radiation-sensitive mixture is suitable for the production of relief structures.
申请公布号 US5783354(A) 申请公布日期 1998.07.21
申请号 US19960711016 申请日期 1996.09.09
申请人 BASF AKTIENGESELLSCHAFT 发明人 SCHWALM, REINHOLD;FUNHOFF, DIRK;BINDER, HORST
分类号 G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/004 主分类号 G03F7/004
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