| 摘要 |
PROBLEM TO BE SOLVED: To enable high-accuracy alignment by finding the position of maximum correlative relation between a registered direct pattern and the pattern of detected mark, adding offset quantity to this position and performing alignment. SOLUTION: Before performing alignment, the direct pattern registration of alignment mark is executed at any arbitrary camera channel. A range to be registered as a pattern and a position on a pattern to be outputted as a result are set and stored in a RAM 186 inside an image processor 23. Next, the area of alignment mark is adjusted so as to be sized as registered in advance at the channel of threshold value in case of binarization. Next, an image inside the channel is binarized at the set binarizing level, a centroid position is calculated and the difference between that centroid position and a pattern registration position is found and stored in the RAM 185 as the offset quantity of centroid position. The stored offset quantity of centroid position is always added when detecting the alignment mark position later. |
