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发明名称
Apparatus and method for texturing rigid-disk substrates
摘要
申请公布号
SG50841(A1)
申请公布日期
1998.07.20
申请号
SG19970001932
申请日期
1997.06.05
申请人
KOMAG, INC.
发明人
LU PETER AN
分类号
B24B7/17;B24B21/00;B24B21/04;G11B5/84;(IPC1-7):B05C19/00;B05D5/00
主分类号
B24B7/17
代理机构
代理人
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地址
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