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发明名称
Coordinated cluster tool energy delivery system
摘要
申请公布号
SG50872(A1)
申请公布日期
1998.07.20
申请号
SG19970002632
申请日期
1997.07.25
申请人
APPLIED MATERIALS, INC.
发明人
NERING, ERIC, A.;FLEMING, DAN, R.
分类号
H02H3/087;H02J1/00;H02J1/10;H02J4/00;H02J7/34;H02M7/02;(IPC1-7):H02J1/00
主分类号
H02H3/087
代理机构
代理人
主权项
地址
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