发明名称 SEMICONDUCTOR MANUFACTURING WITHOUT UNDERCUTTING CONDUCTIVE LINES
摘要 <p>Undercutting (19) of conductive lines (13) in a dense array on a dielectric layer (10) containing an open field is prevented by providing one or more non-functional components (20) such as one or more non-functional conductive lines, in the dielectric layer (10) under the dense array of conductive lines (13).</p>
申请公布号 WO1998031048(A1) 申请公布日期 1998.07.16
申请号 US1997019013 申请日期 1997.10.10
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