申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
YAMAMOTO, AKIRA, JOETSU-SHI, NIIGATA-KEN, JP;ITOH, KEN'ICHI, JOETSU-SHI, NIIGATA-KEN, JP;OSHIMA, MITSUYOSHI, JOETSU-SHI, NIIGATA-KEN, JP;ARAI, MASATOSHI, ANNAKA-SHI, GUNMA-KEN, JP;SAITO, SHIGERU, JOETSU-SHI, NIIGATA-KEN, JP |